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Signal Detection by Segmental Ionization Detector in Environmental SEM
Černoch, Pavel ; Jirák, Josef (advisor)
The dissertation thesis deals with signal detection by an ionization detector in the environmental scanning electron microscope and utilization of this detector to gain required information in a specimen image. Main interest is focused on the detector containing several electrodes with a varied geometry arrangement and voltages on these electrodes. The detector was named segmental ionization detector. Detection capabilities of the segmental ionization detector were studied through computer simulations and experiments in the microscope utilizing knowledge from a technical literature background. On the base of the accomplished experiments, the segmental ionization detector has been optimized for the secondary electron detection improvement and at another configuration optimized for a high material contrast acquisition of the specimen image. Consideration of benefits of the examined segmental ionization detectors is included in the work.
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Signal Detection by Segmental Ionization Detector in Environmental SEM
Černoch, Pavel ; Jirák, Josef (advisor)
The dissertation thesis deals with signal detection by an ionization detector in the environmental scanning electron microscope and utilization of this detector to gain required information in a specimen image. Main interest is focused on the detector containing several electrodes with a varied geometry arrangement and voltages on these electrodes. The detector was named segmental ionization detector. Detection capabilities of the segmental ionization detector were studied through computer simulations and experiments in the microscope utilizing knowledge from a technical literature background. On the base of the accomplished experiments, the segmental ionization detector has been optimized for the secondary electron detection improvement and at another configuration optimized for a high material contrast acquisition of the specimen image. Consideration of benefits of the examined segmental ionization detectors is included in the work.
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Optimalizace detekce sekundárních elektronů segmentovým ionizačním detektorem v environmentálním REM
Černoch, P. ; Jirák, Josef
The article deals with a prezentation of results of optimization of secondary electron detection by an ionization detector in the environmental scanning electron microscope. The ionization detectors consisting of a varied electrode geometry and varied voltages on these electrodes, named segmental ionization detectors, are presented as a possibility to reach desired contrasts in a specimen image. In this work, images acquired by several detectors demonstrate detection of different types of signal electrons utilizing a specimen containing thin surface layers and a specimen made for a material contrast measurement.
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Detekce signálu segmentovým ionizačním detektorem
Černoch, P. ; Jirák, Josef
This article deals with signal detection by a segmental ionization detector. Changes of image contrasts in a dependency on different potentials on electrodes of the segmental ionization detector are studied. Electron trajectories in an electrostatic field in a vacuum simulated via program Simion 3D 7.0 are considered during the experiment.
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Detekce signálu použitím segmantového ionizačního detektoru
Jirák, Josef ; Černoch, P. ; Autrata, Rudolf
For signal electrons detection at environmental conditions, it is often used a detector that utilizes impact ionization in the gaseous environment of a specimen chamber for a signal amplification. An electrostatic field created in a space between a grounded specimen and a detector electrode provides the energy needed for efficient ionization of secondary electrons. A voltage of several hundred volts is attached to the detector electrode. It was proposed an electrode system of a ionization detector, with several concentric electrodes divided into two halves - right and left. It was shown that the higher diameter of the electrodes brings an increased contribution of backscattered electrons to the detected signal. Different contrast mechanisms were studied
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